- 0.5 sccm – 100 slpm Flow Range
- 0.25% Measurement Uncertainty (0.5 – 50 sccm)
- 0.15% Measurement Uncertainty (5 – 100,000 sccm)
- 5 Interchangeable Flow Cells
- 100:1 Turndown Ratio
- 5 – 1500 slpm Flow Range
- 0.25% Measurement Uncertainty (5 – 500 slpm)
- 0.45% Measurement Uncertainty (15 – 1500 slpm)
- Upstream Flow Measuring Capacity of 1500 slpm